Pyrolyzer unit
GD-81D series
PLU-80
Features
This pyrolyzer unit can be used in combination with
the GD-81D Series to detect gases like NF₃ and TEOS.
Designed to be the same size as the previous
PLU-70 unit, eliminating any concerns about
installation space.
Sampling method |
Suction type/Single type |
Principle of detection |
Potentiostatic Electrolysis Method, Pyrolysis-Particle Detection Method |
Explosion protected construction |
Non-explosion protection |
Power source |
24 V DC±10 % |
Dimensions |
Approx. 70(W) x 120(H) x 145(D) mm |
Weight |
Approx. 0.9 kg |
Operating temperature range |
0 to 40 ℃ (no sudden changes) |
Operating humidity range |
30 to 80 %RH (no condensation) |
Target gas
COS, DEMS, DMDMOS, HMDS, HMDSO, NF3, OMCTS, QMS, SiO2, SO2, TEB, TEOP, TEOS, TMB, TMOP, TMP, TMS, TRIMOS, TRIMS