Pyrolyzer unit
GD-70D series
PLU-70
Sampling method |
Suction type/Single type |
Principle of detection |
Potentiostatic Electrolysis Method, Pyrolysis-Particle Detection Method |
Explosion protected construction |
Non-explosion protection |
Power source |
24 VDC±10 % |
Dimensions |
Approx. 70 (W) x 120 (H) x 145 (D) mm |
Weight |
Approx. 0.9kg |
Operating temperature range |
0 to 40℃ (no sudden changes) |
Operating humidity range |
30 to 80%RH (no condensation) |
Target gas
COS, DEMS, DMDMOS, HMDS, HMDSO, NF3, OMCTS, QMS, SiO2, SO2, TEB, TEOP, TEOS, TMB, TMOP, TMP, TMS, TRIMOS, TRIMS
Catalog | |
Manual | |
Specification | |
Dimensions | |
Approvals |